In this paper there is presented a new planar positioning system which is electromagnetically actuated. The movement along each direction is provided by a pair of variable reluctance electromagnetic actuators. The displacement of the mobile part is linear and guided by leaf spring supports on both axes. The position control and acquisition program was designed in LabVIEW. This control is a PWM closed-loop one, using as feedback sensors two foil strain gauges which are glued to the guide springs. The control algorithm uses an offline FEM model designed in the Finite Element Program FEMM software. The design of the XY stage embodies a new approach to the control of planar motion.
closed-loop control, electromagnetic actuator, XY positioning stage gas measurement, controlling software
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